Tencor P2 Long Scan Profiler

Equipment Description 

Specifications are from KLA-Tencor and may vary slightly due to upgrades, options, or revisions this unit may or may not have.

Model Number: 148679
Serial Number: 12910152
Description: P-2
Power Requirements: 115 V, 4 A, Single Phase, 60 Hz

Description:
The Tencor P-2 Long Scan Profiler is a computerized, high-sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. It features the ability to measure micro-roughness with a 1 Å resolution over short distances as well as a waviness over a full, 210-mm (8.2-in) scan. The built-in PC/AT computing power offers precise, automatic measurement capability, data storage, and data analysis.

The Tencor P-2 can profile a variety of materials, including:

• Magnetic disks
• Semiconductor wafers
• Precision-machined and polished surfaces
• Ceramics for micro-electronics
• Glass for flat panel displays
• Optical surfaces

Features:

• Measurement of vertical features ranging from under 100 Å (0.4 µin) to approximately 0.3 mm (11 mils), with a vertical resolution of 1 or 25 Å (0.004 or 0.1 µin). Measurements can be taken in either metric or English units, which are selectable independently for horizontal and vertical parameters.
• Up to 5000 data points per profile guarantee that the horizontal resolution is generally limited by the stylus radius and not by the number of data points.
• Measurement of many roughness and waviness parameters with roughness and waviness separated by user-selectable cutoff filters. A band pass filter allows the separation of intermediate wavelengths.
• Ability to fit and level data, allowing accurate measurements on curved surfaces.
• Ability to detect the edge or apex of a profile artifact, allowing precise comparison of data measured on similar samples.
• Ability to segment a length into multiple scans as in the OD-to-OD profile of a disk with a center hole.
• Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.
• Ability to execute a sequence of up to 300 scans automatically with the Sequence Option.
• Automatic positioning on the sample surface to within a few microns in X, Y, or rotation (motorized rotation is an optional feature).
• Precision mode, allowing precise location of small features and deskew coordinates for automatic operation.
• Built-in, 80386-based PC/AT controller with 40 MB of disk storage.
• Comprehensive database manager and the ability to export the data in a form that is compatible with Lotus 1-2-3 and other commercial programs. (This option is available for the Automatic Long Scan Profiler only.)
• Many ease-of-use features, including programmable stylus force, trackball control of measurement cursors and stage position, color screens with pull-down menus and pop-up windows.
• Accommodation of samples up to 355 mm (14 in) wide, 57.2 mm (2.25 in) thick, and 5 lb (2.2 kg) in weight with the normal configuration.
• Ability to limit operator access by means of a keylock (I do not have the key).

Sequence/Database Manager Option:
The Sequence/Database Manager Option consists of the Sequence and Database Manager software. This option included in the Automatic Long Scan Profiler. The option provides the following:

• Sequence software that enables a user to combine up to 300 recipes and artifact locations into a sequence. The complete sequence can then be run with or without operator intervention.
• Database Manager software that enables data to be saved with up to seven identifiers and later manipulated using the identifiers and time brackets.

Buyer is responsible for all shipping charges from our Boston, MA location.

Price: $8,000 USD